Semiconductor EtherCAT Conformance

For Device Manufacturers targeting the Semiconductor Market

The Semiconductor equipment fabrication supplier market is standardizing on EtherCAT for their industrial communications protocol. Large semiconductor equipment companies such as Applied Materials, Lam Research, ASML, and Tokyo Electron in partnership with the EtherCAT Technology Group (ETG) are leading the charge on this standardization.

Semiconductor manufacturers and machine builders are pushing this standardization to enable low-cycle semiconductor process and ensure that devices can be more easily replaced and understood through congruent data structures and synchronization modes defined in the standards. This means that automation device manufacturers need to implement EtherCAT functionality into their products that they want to sell into the semiconductor market.

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What is ETG.5003?

The ETG.5003 is the EtherCAT device standard for the semiconductor industry that was developed by the Semiconductor Technical Working Group (TWG) of the EtherCAT Technology Group, the governing body of EtherCAT. This specification defines the EtherCAT hardware and software required for automation device manufacturers to implement in order to be EtherCAT Semiconductor Conformant. The ETG.5003 specifications is comprised of two parts: a Common Device Profile (CDP) and a Specific Device Profile (SDP).

What is Common Device Profile (CDP)?

The Common Device Profile (ETG.5003.1) specifies all of the general requirements that all semiconductor EtherCAT devices must conform to. This covers both hardware and software requirements. The CDP also begins to describe features and functionalities which shall be further defined in Specific Device Profiles. This lays out the groundwork for future designs of more advanced machines.

What are the Specific Device Profiles?

Specific Device Profiles are based on the CDP and define the data structure requirements for specific types of devices. The SDPs were developed by the ETG Semiconductor TWG in coordination with various device manufacturers. The SDPs combine with the CDP to create the full specification. There are nine SDPs and a handful more under development. Read about the released versions here:

	Number	Device	Status
1	ETG.5003.2000	Abatement and Sub Fab System	Release 1.1.0
2	ETG.5003.201x	DC & RF Power Generator	Release 1.1.0
3	ETG.5003.2020	Mass Flow Controller	Release 1.1.0
4	ETG.5003.2030	Process Control Value	Release 1.1.0
5	ETG.5003.2040	RF Match	Release 1.1.0
6	ETG.5003.2050	Roughing Pump	Release 1.1.0
7	ETG.5003.2060	Temperature Controller	Release 1.1.0
8	ETG.5003.2070	Turbo Pump	Release 1.1.0
9	ETG.5003.2080	Vacuum Pressure Gauge	Release 1.3.0

HMS Industrial Networks

Solutions for EtherCAT SEMI Conformance

Anybus CompactCom

Is a communications solution that supports the EtherCAT Semiconductor Profile. Both the hardware and software support ETG.5003. This reduces your development time and time to market.

The CompactCom also gives you functionality for all major industrial protocols in the same design which allows you to sell into more markets.

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The Anybus SEMI Starterkit

Gives you a jump start on your software development by providing a framework to build out CDP functionality for your device and is compatible with the CompactCom hardware.

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HMS Solutions Center

Has a large depth of experience working with EtherCAT Semiconductor Device Profiles and can offer you partial or full integration assistance so that you can focus on what you do best, your devices functionality.