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Vacuum Pressure Gauge

SEMI.ETG.5003.2080 

The EtherCAT Technology Group has partnered with industry leaders to create a Specific Device Profile for Semiconductor Vacuum Pressure Gauges termed ETG.5003.2080. Vacuum Pressure Gauges are used to measure the pressure of a gas with pressure sensors and signal processing electronics.

vacuum-pressure-gauge-ethercat (1)

What is the Specific Device Profile for a Vacuum Pressure Gauge - ETG.5003.2080

ETG.5003.2080 describes the network visible component of a semiconductor Vacuum Pressure Gauge (VPG).  This SDP identifies three different classes of vacuum pressure gauges. A Vacuum pressure single gauge device (VG) uses a singular pressure sensor. A combo device (CG) uses multiple pressure sensors but only the signal from one of these sensors is read at a time as the other sensors are either over-range (measured pressure is higher than the sensor can read) or under-range (measured pressure is lower than the sensor can read). This allows for higher precision measurements and a wider pressure range for the vacuum pressure gauge. The third class of vacuum pressure gauges is Multi Device (MG) which also consists of multiple pressure sensors but at least two of these sensors are reading the pressure at the same time while the rest are out of range. Again, this allows for larger pressure range and accuracy. Trip points are loaded into the object dictionary to determine which pressure sensors are active in certain pressure ranges.  

 

This SDP calls out specific hardware requirements with respect to power connection and labeling. It also has well defined object dictionary specifications such as objects for customer specified offset and gain. The PDO mapping specifications break down requirements for each class of vacuum pressure gauge as well. 

How to Implement this SDP and build a device with this conformance?

You will need to start with finding an EtherCAT slave controller and EtherCAT slave software stack to implement general EtherCAT communication. Then you can begin building out the CDP and SDP. Implementation of this SDP must be done in conjunction with the CDP because much of the SDP is based on CDP specifications. Most of this SDP pertains to software requirements specifically for the devices object dictionary and PDO mapping. Implementation of this SDP requires detailed knowledge of the SDP specification and your device's application.

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HMS Solutions for EtherCAT SEMI Conformance:

HMS offers hardware, software, and development services throughout each step in this process. HMS's experience and expertise in industrial communications can be leveraged to develop some or all of your SDP and CDP. See the chart below to review how HMS can help through the full ETG.5003 development process: 

HMS-Solutions_semiconductor

Other EtherCAT Solutions from HMS Industrial Networks:

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Anybus CompactCom

  • Functionality for all major industrial protocols in the same design
  • Supports the EtherCAT semiconductor profile

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Anybus SEMI Starterkit

  • Provides a framework to build out CDP functionality for your device
  • Compatible with the Anybus CompactCom hardware

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HMS Solutions Center

  • Has a large depth of experience working with EtherCAT Semiconductor Device Profiles
  • Offer partial or full integration assistance

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Infographic

How do I make my device Semiconductor conformant? Discover the easy steps in this Semiconductor EtherCAT Device Development Journey Infographic

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