The EtherCAT Technology Group has partnered with industry leaders to create a Specific Device Profile for Semiconductor Roughing Pumps termed ETG.5003.2050. Roughing pumps provide an initial atmospheric pressure reduction so that another pumping system can operate.
ETG.5003.2050 describes the network visible component of an semiconductor Roughing Pump. This SDP identifies two configurations of a roughing pump device: the first is a Roughing Vacuum Pump and the second is a Roughing Vacuum Pump and Booster Pump. A Roughing Vacuum Pump reduces the atmospheric pressure to a setpoint that another pumping system can operate. The addition of the booster pump to the inlet of the main pump decreases the pressure at the vacuum pump inlet even further. The SDP also identifies two control modes: Coordinated Mode where the Boosters follow the Roughing pump automatically and Independent Mode where the Boosters start by a control bit. This SDP calls out some specific object dictionary and PDO Mapping requirements as well.
You will need to start with finding an EtherCAT slave controller and EtherCAT slave software stack to implement general EtherCAT communication. Then you can begin building out the CDP and SDP. Implementation of this SDP must be done in conjunction with the CDP because much of the SDP is based on CDP specifications. Most of this SDP pertains to software requirements specifically for the devices object dictionary and PDO mapping. Implementation of this SDP requires detailed knowledge of the SDP specification and your device's application.
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HMS offers hardware, software, and development services throughout each step in this process. HMS's experience and expertise in industrial communications can be leveraged to develop some or all of your SDP and CDP. See the chart below to review how HMS can help through the full ETG.5003 development process:
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