The EtherCAT Technology Group has partnered with industry leaders to create a Specific Device Profile for Semiconductor DC & RF Power Generators termed ETG.5003.2010 and ETG.5003.2011. DC and RF Power Generators are needed for highly precise process control and arc management for critical processes in high-tech manufacturing, such as semiconductor wafer, solar cell manufacturing, and flat panel display production. Precise DC and RF Power Generators are necessary for excellent film quality and homogeneity results. DC Power Generators convert AC power to precisely regulated DC power ranging from low to high power output depending on the device. RF Power Generators convert AC power into regulated RF output power across a large power and frequency range. Both power generators take in sensor feedback to ensure clean a precise power for control of plasma applications.
ETG.5003.2010 is the Specific Device Profile for DC Power Generators and ETG.5003.2011 is the SDP for RF Power Generators. Both SDPs describe the networks visible component of each device and both are extremely similar profiles with regards to object indexes, status and control bits, etc. These SDPs are flexible enough to be utilized for power generators across most of the frequency range and power range. It includes devices of low power (1 kW) to high power (96kW or more). The DC profile, 2010, is for Direct Current power generators and the RF profile, 2011, covers devices with Low, Medium and High Frequencies.
You will need to start with finding an EtherCAT slave controller and EtherCAT slave software stack to implement general EtherCAT communication. Then you can begin building out the CDP and SDP. Implementation of this SDP must be done in conjunction with the CDP as much of the SDP is based on CDP specifications. Most of this SDP pertains to software requirements specifically for the devices object dictionary and PDO mapping. Implementation of this SDP requires detailed knowledge of the SDP specification and your device's application.
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HMS offers hardware, software, and development services throughout each step in this process. HMS's experience and expertise in industrial communications can be leveraged to develop some or all of your SDP and CDP. See the chart below to review how HMS can help through the full ETG.5003 development process:
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How do I make my device Semiconductor conformant? Discover the easy steps in this Semiconductor EtherCAT Device Development Journey Infographic
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